The cleaning methods are typically immersion, circulation, spraying and/or wiping. The surfaces should be thoroughly dried after oxygen cleaning to ensure that there is no moisture left within the system. This is often done using filtered clean air or nitrogen.

Oxygen cleaning services are necessary for both safety and product purity considerations. Oxygen cleaning reduces contaminants that can lead to a fire or potential explosion. It also reduces the chance of autoignition at a temperature much lower than expected by material selection.

Components and hardware that are used in oxygen environments may require specialized oxygen cleaning services performed in a designated cleanroom. Cleanrooms are special facilities designed to maintain extremely low levels of airborne particulates, such as dust, airborne organisms, or vaporized particles.